Hi Folks,
Cant seem to find what Im looking for in my personal library, so I
thought this would be the best place to ask for ideas. I am looking for
a text which can describe to a process engineer, the basic principles of
RF, especially how it works in plasma generation for etching and/or
sputtering ( yup, you guessed it, semiconductors being made here) They
don't get into RF in those fancy eastern colleges whats hands outs
degreez in engrish, etc. I have a few process folks here who have asked
what Its all about, and without taking a lot of time, I cant answer in a
way that would mean much. (You should see the classic blank stare when
I've tried) Any thoughts gratefully accepted. Tanks! (no pun intended)
73z, Doug, N2BEG qrp-l # 850, etc...
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